Variable Flow Gas Delivery Blending System

Specialty gas delivery is a critical element in semiconductor wafer manufacturing. While costly, most semiconductor fabs purchase their high-purity gasses, including hydrogen nitrogen and helium nitrogen, in premixed cylinders to ensure the accuracy and blend of the gas. A manufacturer of gas delivery systems partnered with CollabraTech to develop a variable flow blending system that would improve performance and reduce cost of gas delivery in high-volume wafer production lines. Careful analysis of the company’s current system showed it was inefficient, and used too much product at low purity. CTS engineers worked with the partner’s team to successfully develop a mixing technology with superior performance that delivered better results than could be supplied by traditional mixing approaches, all at reduced cost.