Citadel™ VMB

Features & Benefits

  • Inert, toxic and hazardous gases; manual, semi-auto and fully automatic with a touch-screen interface
  • Cabinet or panel mount
  • Up to 8 individual UHP gas sticks in a compact enclosure
  • Variable stick configurations provide versatility
  • Straight-through valve design improves gas flow and reduces internal volume
  • Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
  • Optional vent with vacuum generator; N2 purge for efficient and safe purging of hazardous gases
  • ESO or stick shutdown capability for individual tool control
  • SEMI-S2 compliant

Valve Manifold Box

The CollabraTech Citadel™ VMB provides safe and reliable distribution points for a gas system. The VMB can include up to eight individual sticks distributing gas from a single supply line. An optional integrated vacuum generator and N2 purge provide a safe and effective means of purging the lines for service. The VMB system can be configured for a fully automatic system, a semi-automatic system or a fully manual system with ESO capability.

The Citadel VMB system is configured in either a panel VMP (for inert gases), or a cabinet (for systems that require exhaust capabilities). The system controller varies depending on the need for automation and factory communications.

The family of controllers includes manual push-button operations as an economic option for simpler systems, a semi-automatic operation that maintains the safety functions of the automatic with minimal shutdown capabilities and fully automatic distribution venting and purge functions. The automatic systems can be selected as up to 4- or 8-stick standard configurations. All VMBs are available with a double-isolation configuration for all of the process valves. Contact CollabraTech for assistance in developing a system to meet your process needs.