Features & Benefits:

• Inert, toxic hazardous gases; semi-auto or fully automatic with a touchscreen interface
• Cabinet or rack mounted
• Single-, dual- and multiple-process panel configurations
• Optional purge panel with purge procedure proven in corrosive applications, such as F2, HF, HCl, and WF6
• Engineered to process requirements
• Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
• Modular construction improves service and maintenance
• SEMI-S2 compliant

Custom Gas Cabinet

A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, an extensive list of options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. CollabraTech also provides custom systems and solutions in circumstances where standard configurations are not sufficient.

The Gas Distribution System is configured in either a rack for inert gases, or a cabinet for systems that require either containment or exhaust capabilities. The system controller varies depending on the need for automation and factory communications.

The family of controllers includes a manual switch for cylinder changeover, a semi-automatic changeover that monitors pressure or cylinder weight and fully automated changeover, complete with userconfigurable alarms and operating parameters, such as timers and set points. Contact CollabraTech for assistance in developing a system that meets your needs.

Controller Options

• Manual switch for automatic cylinder changeovers
• Semi-auto systems with automatic switchover
• Fully automated systems with purge routines

Cabinet Options

• 1-,2-, and 3-cylinder gas rack
• 1-,2-, and 3-cylinder gas cabinet

Panel Options

• Purge panel
  • Regulator
  • Purifiers
  • Pressure switch
  • Transmitter
• Process panel
  • Manual panels, 3–8 valves
  • Automatic panels, 5–8 valves
  • Purifiers & filters
  • Pressure switches
  • Transmitters
  • Flow switches
  • Test valves
  • Manual isolation valves
  • Emergency shutoff valves