Features & Benefits:

• Inert, toxic hazardous gases; semi-auto or fully automatic with a touchscreen interface
• Cabinet or rack mounted
• Single-, dual- and multiple-process panel configurations
• Optional purge panel with purge procedure proven in corrosive applications, such as F₂, HF, HCl, and WF₆
• Engineered to process requirements
• Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
• Modular construction improves service and maintenance
• SEMI-S2 compliant

Gas Cabinet

A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, an extensive list of options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. CollabraTech also provides custom systems and solutions in circumstances where standard configurations are not sufficient.

The Gas Distribution System is configured in either a rack for inert gases, or a cabinet for systems that require either containment or exhaust capabilities. The system controller varies depending on the need for automation and factory communications.

The family of controllers includes a manual switch for cylinder changeover, a semi-automatic changeover that monitors pressure or cylinder weight and fully automated changeover, complete with user-configurable alarms and operating parameters, such as timers and set points. Contact CollabraTech for assistance in developing a system that meets your needs.

Controller Options

• Manual switch for automatic cylinder changeovers
• Semi-auto systems with automatic switchover
• Fully automated systems with purge routines

Cabinet Options

• 1-,2-, and 3-cylinder gas rack
• 1-,2-, and 3-cylinder gas cabinet
  

  Panel Options

  • Purge panel
    • Regulator
    • Purifi ers
    • Pressure switch
    • Transmitter
  • Process panel
    • Manual panels, 3–8 valves
    • Automatic panels, 5–8 valves
    • Purifiers & filters
    • Pressure switches
    • Transmitters
    • Flow switches
    • Test valves
    • Manual isolation valves
    • Emergency shutoff valves

  Gas Cabinet Enclosure

  • 1 & 2 cylinder: 28’’ W x 23” D x 83.5” H with 6” exhaust
  • 3 cylinder: 42” W x 23” D x 83.5” H with 6” exhaust

  Safety Options

  • UV/IR sensor
  • Temperature switch
  • Leak sensor
  • Door interlocks
  • Remote shutdown relays
  • EMO
  • Sprinklers
  • Heat
  • Cool (Chiller)