Gas Cabinets

Features & Benefits

• Inert, toxic hazardous gases; semi-auto or fully automatic with a touchscreen interface
• Cabinet or rack-mounted
• Single-, dual- and multiple-process panel configurations
• Optional purge panel with purge procedure proven in corrosive applications, such as F2, HF, HCl, and WF6
• Engineered to process requirements
• Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
• Modular construction improves service and maintenance
• SEMI-S2 compliant

Gas Cabinet

A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, an extensive list of options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. CollabraTech also provides custom systems and solutions in circumstances where standard configurations are not sufficient.

The family of controllers includes a manual switch for cylinder changeover, a semi-automatic changeover that monitors pressure or cylinder weight and fully automated changeover, complete with user-configurable alarms and operating parameters, such as timers and set points. Contact CollabraTech for assistance in developing a system that meets your needs.

Controller Options

• Manual switch for automatic cylinder changeovers
• Semi-auto systems with automatic switchover
• Fully automated systems with purge routines

Cabinet Options

• 1-,2-, and 3-cylinder gas rack
• 1-,2-, and 3-cylinder gas cabinet

Panel Options

• Purge panel
• Regulator
• Purifiers
• Pressure switch
• Transmitter

• Process panel
• Manual panels, 3–8 valves
• Automatic panels, 5–8 valves
• Purifiers & filters
• Pressure switches
• Transmitters
• Flow switches
• Test valves
• Manual isolation valves
• Emergency shutoff valves

Gas Cabinet Enclosure

• M1 & 2 cylinder: 26’’ W x 28” D x 90” H with 6” exhaust
• 3 cylinder: 42” W x 28” D x 90” H with 6” exhaust

Safety Options

• UV/IR sensor
• Temperature switch
• Leak sensor
• Door interlocks
• Remote shutdown relays
• EMO
• Sprinklers
• Heat
• Cool (Chiller)