Gas Cabinets

Features & Benefits:

  • Inert, toxic hazardous gases; semi-auto or fully automatic with a touchscreen interface
  • Cabinet or rack mounted
  • Single-, dual- and multiple-process panel configurations
  • Optional purge panel with purge procedure proven in corrosive applications, such as F2, HF, HCl, and WF6
  • Engineered to process requirements
  • Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
  • Modular construction improves service and maintenance
  • SEMI-S2 compliant

Gas Cabinet

A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, an extensive list of options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. CollabraTech also provides custom systems and solutions in circumstances where standard configurations are not sufficient.

The Gas Distribution System is configured in either a rack for inert gases, or a cabinet for systems that require either containment or exhaust capabilities. The system controller varies depending on the need for automation and factory communications.

The family of controllers includes a manual switch for cylinder changeover, a semi-automatic changeover that monitors pressure or cylinder weight and fully automated changeover, complete with user-configurable alarms and operating parameters, such as timers and set points. Contact CollabraTech for assistance in developing a system that meets your needs.

Controller Options

  • Manual switch for automatic cylinder changeovers
  • Semi-auto systems with automatic switchover
  • Fully automated systems with purge routines

Cabinet Options

  • 1-,2-, and 3-cylinder gas rack
  • 1-,2-, and 3-cylinder gas cabinet

    Panel Options

    • Purge panel
      • Regulator
      • Purifi ers
      • Pressure switch
      • Transmitter
    • Process panel
      • Manual panels, 3–8 valves
      • Automatic panels, 5–8 valves
      • Purifiers & filters
      • Pressure switches
      • Transmitters
      • Flow switches
      • Test valves
      • Manual isolation valves
      • Emergency shutoff valves

    Gas Cabinet Enclosure

    • 1 & 2 cylinder: 28’’ W x 23” D x 83.5” H with 6” exhaust
    • 3 cylinder: 42” W x 23” D x 83.5” H with 6” exhaust

    Safety Options

    • UV/IR sensor
    • Temperature switch
    • Leak sensor
    • Door interlocks
    • Remote shutdown relays
    • EMO
    • Sprinklers
    • Heat
    • Cool (Chiller)