Liquid Delivery Systems

Client Profile

An international semiconductor OEM, with confidential IP and processes

Technical Challenge

The client was in the process of developing a next-generation deposition tool with new chemistries and flow characteristics. To develop and optimize the tool design, the client needed liquid delivery systems that allowed the study of various process parameters in a safe and controlled manner. The client’s current liquid delivery system supplier was unwilling to offer the technical guidance or the customized system to address the development needs.

CTS Solution

Over the course of months, CTS worked with the client to develop and deliver R&D liquid delivery systems. The systems provided the ability to deliver multiple precursor chemistries at various parameters, along with quick purge capabilities. Upon completion of development, CTS designed and delivered production systems to provide optimized results and work in coordination with existing HVM systems.