Valve Manifold Boxes

Features & Benefits

• Inert, toxic and hazardous gases; manual, semi-auto and fully automatic with a touch-screen interface
• Cabinet or panel mount
• Up to 8 individual UHP gas sticks in a compact enclosure
• Variable stick configurations provide versatility
• Straight-through valve design improves gas flow and reduces internal volume
• Life safety relay logic to override PLC for fi re, leak, toxic and facility shutdowns with relay feedback
• Optional vent with vacuum generator; N2 purge for efficient and safe purging of hazardous gases
• ESO or stick shutdown capability for individual tool control
• SEMI-S2 compliant

Valve Manifold Box

The CollabraTech Valve Manifold Box (VMB) provides safe and reliable distribution points for a gas system. The VMB can include up to eight individual sticks distributing gas from a single supply line. An optional integrated vacuum generator and N2 purge provide a safe and eff ective means of purging the lines for service. The VMB system can be configured for a fully automatic system, a semi-automatic system or a fully manual system with ESO capability.

The Valve Manifold Box system is configured in either a panel VMP (for inert gases), or a cabinet (for systems that require exhaust capabilities). The system controller varies depending on the need for automation and factory communications.

The family of controllers includes manual push-button operations as an economic option for simpler systems, a semi-automatic operation that maintains the safety functions of the automatic with minimal shutdown capabilities and fully automatic distribution venting and purge functions. The automatic systems can be selected as up to 4- or 8-stick standard configurations. All VMBs are available with a double-isolation configuration for all of the process valves. Contact CollabraTech for assistance in developing a system to meet your process needs.

Controller Options

• Manual push-button
• Up to 8-stick semi-auto
• Up to 4-stick auto
• Up to 8-stick auto

VMB Features

• UV/IR sensor
• Temperature switch
• Door interlocks
• Remote shutdown relays
• EMO
• Sprinklers
• Toxic monitors

VMB Enclosure

• 27” W x 19.23” D x 28” H with 3” exhaust

Optional VMB Accessories

• Door/Window Sensors: Provide programmable alarm if door or window is opened
• Toxic Monitor: Monitors enclosure continuously for any sign of toxic leak
• Fire Sensors: Standard temperature switch or optional UV/IR or dual IR sensors
• Panel Heater for LVP gases